PLASMA IMMERSION ION IMPLANTER FOR THE MODIFICATION OF INDUSTRIAL AEROSPACE COMPONENTS核聚变与等离子体物理论文

PLASMA IMMERSION ION IMPLANTER FOR THE MODIFICATION OF INDUSTRIAL AEROSPACE COMPONENTS核聚变与等离子体物理论文

【题名】：PLASMA IMMERSION ION IMPLANTER FOR THE MODIFICATION OF INDUSTRIAL AEROSPACE COMPONENTS核聚变与等离子体物理论文(PLASMA IMMERSION ION IMPLANTER FOR THE MODIFICATION OF INDUSTRIAL AEROSPACE COMPONENTSHeJuBianYuDengLiZiTiWuLiLunWen)
【关键词】：等离子体沉积离子注入薄膜沉积等离子体源
【keywords】：DengLiZiTiChenJi LiZiZhuRu BaoMoChenJi DengLiZiTiYuan
【作者】：TONGHong-hui,CHENQin-chuan,HUOYan-feng,WANGKe,FENGTan-min,MULi-lan,ZHAOJun,PaulKChu,      【来源】：知识词典
【期刊名称】：核聚变与等离子体物理(HeJuBianYuDengLiZiTiWuLi)
【国际标准刊号】：0254-6086        【国内统一刊号】：51-1151
【作者单位】：[1]DepartmentofPhysics&MaterialsScience,CityUniversityofHongKong,83TatCheeAvenue,Kowloon,HongKong [2]SouthwesternInstituteofPhysics,Chengdu610041([1]DepartmentofPhysics&MaterialsScience,CityUniversityofHongKong,83TatCheeAvenue,Kowloon,HongKong [2]SouthwesternInstituteofPhysics,Chengdu610041)
【分类号】：O484.1 O539      【页码】：-186-192      【出版年】：2003.3
        A commercial plasma immersion ion implanter has been designed and constructed to enhance the surface properties of parts and components used in aerospace applications. The implanter consists of a vac-uum chamber, pumping and gas inlet system, custom sample chuck, four sets of hot-filaments, three-filtered vacuum arc plasma sources, special high voltage modulator, as well as monitoring and control systems. Special attention has been paid to improve the uniformity of plasma in the chamber. The power modulator operates in both the pulse bunching and single pulse modes. The maximum pulse voltage output is 80kV, maximum pulse current is 60A, and repetition frequency is 50-500Hz. The target chuck has been specially designed for uni-form implantation into multiple aerospace components with irregular geometries as well as effective sample cool-ing. An in situ temperature monitoring device comprising dual thermocouples has been developed. The instru-ment was installed in an aerospace company and has been operating reliably for a year. In addition to reporting some of the hardware innovations, data on the improvement of the lifetime of an aircraft hydraulic pump disk using a dual nitrogen treatment process [60-70kV & (1-6)× 10^17 cm^-2; 30 - 45kV & (1 -4) × 10^17cm^-2 ] are presented. This treatment protocol has been adopted as a standard production procedure in the fac-tory.

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