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    知识词典 论文期刊 电子学报:英文版
A Novel Frequency Output Accelerometer Using Ring Oscillator and Mixer电子学报:英文版论文

 
【题名】:A Novel Frequency Output Accelerometer Using Ring Oscillator and Mixer电子学报:英文版论文(A Novel Frequency Output Accelerometer Using Ring Oscillator and MixerDianZiXueBao:YingWenBanLunWen)
【关键词】:数字加速计 环形振荡器 混频器 频率输出 MEMS
【keywords】:ShuZiJiaSuJi HuanXingZhenDangQi HunPinQi PinLvShuChu MEMS
【作者】:ZHANGZhaohua YUERuifeng LIULitian      【来源】: 知识词典
【期刊名称】:电子学报:英文版(DianZiXueBao:YingWenBan)
【国际标准刊号】:1022-4653        【国内统一刊号】:
【作者单位】:InstituteofMicroelectronics,TsinghuaUniversity,Beijing100083,China(InstituteofMicroelectronics,TsinghuaUniversity,Beijing100083,China)
【分类号】:TH824.4      【页码】:-75-78      【出版年】:2004.1
        A novel digital accelerometer using ring oscillator and mixer is presented. The sensitive unit of this accelerometer is MOS ring oscillators located on silicon beams. The output is frequency signal. Mixer is used as interior signal processor in order to improve characteristics of the output signal. The accelerometer has many perfect characteristics such as high sensitivity, low temperature coefficient and simple fabrication process. The frequency character of MOS ring oscillator and its relationship with acceleration are described. The MOS ring oscillator, mixer circuits and physical structures of this accelerometer are designed. The device was fabricated by standard IC process mixed with MEMS process. The sensitivity of fabricated devices is 6.91 kHz/g.

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